US 12,330,152 B2
Microfluidic sensor chip and measuring system thereof
Yu-Tai Li, Taichung (TW); Chia-Jen Lin, New Taipei (TW); Wei-Yu Lin, Zhubei (TW); Kao-Chi Lin, Kaohsiung (TW); Cho-Fan Hsieh, Yilan County (TW); and Teng-Chun Wu, Kinmen County (TW)
Assigned to INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, Hsinchu (TW)
Filed by INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, Hsinchu (TW)
Filed on Jan. 13, 2022, as Appl. No. 17/575,290.
Claims priority of application No. 110138264 (TW), filed on Oct. 15, 2021.
Prior Publication US 2023/0122850 A1, Apr. 20, 2023
Int. Cl. G01N 21/552 (2014.01); B01L 3/00 (2006.01); G01N 21/3581 (2014.01); G01N 21/59 (2006.01)
CPC B01L 3/502715 (2013.01) [G01N 21/3581 (2013.01); G01N 21/554 (2013.01); B01L 2300/04 (2013.01); G01N 2021/5903 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A microfluidic sensor chip, comprising:
a body comprising a substrate and an upper cover, and the upper cover having at least one opening;
at least one microfluidic channel formed on the substrate and has a supporting surface, wherein the at least one microfluidic channel communicates with the at least one opening; and
a metamaterial layer coated on the supporting surface, wherein the metamaterial layer has a plurality of regions, and each region has a corresponding resonance pattern,
wherein the upper cover has a first recessed part recessed towards the substrate, and a projection of the first recessed part on the substrate covers projections of the regions on the substrate.