US 12,330,105 B2
Self-locking manifold and filter
Kobold Yang, Hsinchu (TW); Han Yi Wang, Hsinchu (TW); Bob Shie, Hsinchu (TW); and Hee Jun Yang, Songpa-gu (KR)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by Entegris, Inc., Billerica, MA (US)
Filed on Sep. 27, 2021, as Appl. No. 17/486,127.
Claims priority of provisional application 63/085,639, filed on Sep. 30, 2020.
Prior Publication US 2022/0096984 A1, Mar. 31, 2022
Int. Cl. B01D 46/00 (2022.01)
CPC B01D 46/001 (2013.01) [B01D 46/0012 (2013.01); B01D 46/0015 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A filter, comprising:
a body;
a first end having a first filter aperture;
a first flange, located at the first end;
a second end, opposite the first end and having a second filter aperture,
wherein the first flange has a shape in plan view including a major axis and a minor axis and has a greater length along the major axis than a width along the minor axis, and
the first flange includes a stopper protruding from the first flange, the stopper configured to contact a retention feature of a filter manifold when the first flange is inserted into the filter manifold and rotated into a locking position.