CPC H10K 71/00 (2023.02) [B32B 37/0046 (2013.01); B32B 37/1018 (2013.01); B32B 41/00 (2013.01); B32B 2309/68 (2013.01); B32B 2457/20 (2013.01); H10K 50/841 (2023.02); H10K 59/122 (2023.02)] | 20 Claims |
1. A lamination apparatus comprising:
a first jig comprising an accommodating recess defined by a bottom surface through which a plurality of vacuum holes is defined and side surfaces bent and extending from the bottom surface;
a cover member in which an opening exposing at least one vacuum hole among the plurality of vacuum holes and having a width wider than a width of the at least one vacuum hole is defined;
a second jig disposed to face the first jig;
a pad disposed on the second jig; and
a controller which sets zero data based on a vacuum value measured from the at least one vacuum hole.
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