US 12,009,805 B2
DMS filter, electroacoustic filter and multiplexer
Thomas Bauer, Munich (DE); Ansgar Schäufele, Munich (DE); and Thomas Dengler, Munich (DE)
Assigned to RF360 Singapore Pte. Ltd., Singapore (SG)
Appl. No. 17/434,362
Filed by RF360 SINGAPORE PTE. LTD, Singapore (SG)
PCT Filed Mar. 16, 2020, PCT No. PCT/EP2020/057021
§ 371(c)(1), (2) Date Aug. 26, 2021,
PCT Pub. No. WO2020/187811, PCT Pub. Date Sep. 24, 2020.
Claims priority of application No. 10 2019 107 010.4 (DE), filed on Mar. 19, 2019.
Prior Publication US 2022/0103161 A1, Mar. 31, 2022
Int. Cl. H03H 9/64 (2006.01); H03H 9/02 (2006.01); H03H 9/145 (2006.01)
CPC H03H 9/6453 (2013.01) [H03H 9/02637 (2013.01); H03H 9/02834 (2013.01); H03H 9/14541 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A DMS filter, comprising:
a first port and a second port;
a piezoelectric material; and
an electrode structure arranged above or on the piezoelectric material and electrically connected between the first port and the second port, wherein:
the electrode structure has a multi layer construction,
the multi layer construction comprises metal and dielectric material, the electrode structure comprising:
a first reflector and a second reflector;
first IDTs and second IDTs, wherein the first IDTs and the second IDTs are arranged between the first and the second reflectors; and
a first inter IDT connection and a second inter IDT connection, wherein:
each of the first IDTs and each of the second IDTs have a first busbar and a first connection and a second busbar and a second connection,
the first busbar and the first connection of each of the first IDTs are electrically connected via the first inter IDT connection,
the second busbar and the second connection of each of the second IDTs are electrically connected via the second inter IDT connection, and
wherein the first inter IDT connection and the second inter IDT connection each comprise a lower metal strip and an upper metal strip.