US 12,009,802 B2
Baw resonator with improved top electrode connection
Maximilian Schiek, Puchheim (DE); and Willi Aigner, Moosinning (DE)
Assigned to RF360 Singapore Pte. Ltd., Singapore (SG)
Appl. No. 17/257,848
Filed by RF360 SINGAPORE PTE. LTD., Republic Plaza (SG)
PCT Filed Jul. 1, 2019, PCT No. PCT/EP2019/067606
§ 371(c)(1), (2) Date Jan. 4, 2021,
PCT Pub. No. WO2020/025235, PCT Pub. Date Feb. 6, 2020.
Claims priority of application No. 102018118701.7 (DE), filed on Aug. 1, 2018.
Prior Publication US 2021/0297059 A1, Sep. 23, 2021
Int. Cl. H03H 9/13 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/17 (2006.01); H03H 9/205 (2006.01)
CPC H03H 9/132 (2013.01) [H03H 3/02 (2013.01); H03H 9/02118 (2013.01); H03H 9/175 (2013.01); H03H 9/205 (2013.01); H03H 2003/025 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A BAW resonator, comprising:
a bottom electrode;
a piezoelectric layer;
a top electrode;
a spacer arranged above the piezoelectric layer and disposed on the top electrode;
a capping layer sitting on the spacer and keeping an air-filled gap to the top electrode
a top electrode connection arranged above the capping layer; and
an electrically conductive path connecting the top electrode and the top electrode connection.