US 12,009,797 B2
Laterally excited bulk wave device with acoustic mirror
Rei Goto, Osaka (JP)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on Sep. 20, 2022, as Appl. No. 17/933,786.
Application 17/933,786 is a continuation of application No. 17/108,879, filed on Dec. 1, 2020, granted, now 11,463,065.
Claims priority of provisional application 62/943,116, filed on Dec. 3, 2019.
Prior Publication US 2023/0121844 A1, Apr. 20, 2023
Int. Cl. H03H 9/02 (2006.01); H03H 9/205 (2006.01); H03H 9/58 (2006.01)
CPC H03H 9/02015 (2013.01) [H03H 9/02102 (2013.01); H03H 9/0211 (2013.01); H03H 9/02228 (2013.01); H03H 9/205 (2013.01); H03H 9/589 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A laterally excited bulk acoustic wave device comprising:
a support substrate;
a solid acoustic mirror on the support substrate, the solid acoustic mirror being an acoustic Bragg reflector including alternating low impedance layers and high impedance layers, the high impedance layers each having a thickness in a range from about 0.14 λp to 0.3 λp or from about 0.35 λp to 0.45 λp, and the high impedance layers each having a thickness in a range from about 0.1 λp to 0.3 λp, in which λp is a wave length of longitudinal wave velocity, the thickness of the high impedance layers and the thickness of the low impedance layers being different;
a piezoelectric layer on and in contact with at least a portion the solid acoustic mirror; and
an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode overlapping the portion of the solid acoustic mirror, the interdigital transducer electrode arranged to laterally excite a bulk acoustic wave.