US 12,009,755 B2
High-frequency power supply device
Naoki Yasuda, Kyoto (JP)
Assigned to Shimadzu Corporation, Kyoto (JP)
Filed by SHIMADZU CORPORATION, Kyoto (JP)
Filed on Jan. 21, 2022, as Appl. No. 17/581,039.
Claims priority of application No. 2021-011930 (JP), filed on Jan. 28, 2021.
Prior Publication US 2022/0239229 A1, Jul. 28, 2022
Int. Cl. H02M 3/338 (2006.01); H01J 37/32 (2006.01); H02M 7/00 (2006.01); H02M 7/48 (2007.01); H02M 7/5383 (2007.01)
CPC H02M 3/3385 (2013.01) [H01J 37/321 (2013.01); H01J 37/32174 (2013.01); H02M 7/003 (2013.01); H02M 7/4815 (2021.05); H02M 7/4818 (2021.05); H02M 7/5383 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A self-oscillation high-frequency power supply device, comprising:
a DC power supply;
an LC resonant circuit including an induction coil for plasma generation and a capacitor;
a switching circuit including a semiconductor element, the switching circuit being configured to subject DC power supplied from the DC power supply to switching processing to supply high-frequency power to the LC resonant circuit, and
a transformer including a primary coil included in the LC resonant circuit and a secondary coil connected to the semiconductor element to turn on/off the semiconductor element,
wherein the transformer is formed in a coaxial structure in which the primary coil and the secondary coil are coaxially provided, and
wherein the LC resonant circuit includes a parallel circuit consisting only of the primary coil of the transformer and a resistor.