US 12,009,726 B2
Vacuum pump and magnetic-bearing-integrated motor
Takahiro Mori, Kyoto (JP); Tsunehiro Inoue, Kyoto (JP); Tomoo Ota, Kyoto (JP); Masatsugu Takemoto, Sapporo (JP); and Yu Fu, Sapporo (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP)
Appl. No. 17/612,087
Filed by SHIMADZU CORPORATION, Kyoto (JP)
PCT Filed May 24, 2019, PCT No. PCT/JP2019/020688
§ 371(c)(1), (2) Date Nov. 17, 2021,
PCT Pub. No. WO2020/240621, PCT Pub. Date Dec. 3, 2020.
Prior Publication US 2022/0216767 A1, Jul. 7, 2022
Int. Cl. H02K 7/09 (2006.01); F04D 19/04 (2006.01); F04D 25/06 (2006.01); F16C 32/04 (2006.01); H02K 21/20 (2006.01)
CPC H02K 7/09 (2013.01) [F04D 19/04 (2013.01); F04D 25/06 (2013.01); F16C 32/0474 (2013.01); H02K 21/20 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A vacuum pump comprising:
a rotor including a rotary shaft having an axial direction;
a rotor blade provided on the rotary shaft; and
a magnetic-bearing-integrated stator including at least a first coil and configured to apply a rotational force to rotationally drive the rotor and a bearing force to magnetically support the rotor; wherein
the rotor includes:
a pair of spacer members;
a support member provided on an outer circumference of the rotary shaft to receive a pressure applied in the axial direction during assembly via contact with each of the pair of spacer members;
a permanent magnet provided so as to contact and surround an outer circumference of the support member; and
a non-conductive protective ring having an annular shape, the protective ring being provided on an outer circumference of the permanent magnet in non-contact with the pair of spacer members in the axial direction; and
in the axial direction of the rotary shaft, the support member has a mechanical strength higher than that of the protective ring, wherein:
the pair of spacer members are arranged so as to sandwich the support member in the axial direction, and
the support member, the permanent magnet, and the non-conductive protective ring are arranged in this stated order from inside in a radial direction of the rotor.