US 12,009,442 B2
Light detector, light detection system, lidar device, and moving body
Honam Kwon, Kawasaki Kanagawa (JP); Mariko Shimizu, Setagaya Tokyo (JP); Kazuaki Okamoto, Yokohama Kanagawa (JP); and Kazuhiro Suzuki, Meguro Tokyo (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Aug. 31, 2021, as Appl. No. 17/446,591.
Claims priority of application No. 2021-004297 (JP), filed on Jan. 14, 2021.
Prior Publication US 2022/0223749 A1, Jul. 14, 2022
Int. Cl. H01L 31/00 (2006.01); G01S 7/481 (2006.01); G01S 7/4863 (2020.01); H01L 31/0232 (2014.01); H01L 31/107 (2006.01); G01S 17/931 (2020.01)
CPC H01L 31/02327 (2013.01) [G01S 7/4816 (2013.01); G01S 7/4863 (2013.01); H01L 31/107 (2013.01); G01S 17/931 (2020.01)] 20 Claims
OG exemplary drawing
 
1. A light detector comprising:
a junction region including a first semiconductor region of a first conductivity type and a second semiconductor region of a second conductivity type, the second semiconductor region being provided on the first semiconductor region and forming a p-n junction surface with the first semiconductor region;
a first insulating portion having an inclined surface inclined with respect to a first direction perpendicular to the p-n junction surface, a first insulating portion including void, the inclined surface facing the junction region in a second direction perpendicular to the first direction; and
a quenching part electrically connected to the second semiconductor region.