US 12,009,244 B2
Tunable temperature controlled substrate support assembly
Vijay D. Parkhe, San Jose, CA (US); Steven E. Babayan, Los Altos, CA (US); Konstantin Makhratchev, Fremont, CA (US); Zhiqiang Guo, Sunnyvale, CA (US); Phillip R. Sommer, Newark, CA (US); and Dan A. Marohl, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 13, 2020, as Appl. No. 16/741,330.
Application 16/741,330 is a continuation of application No. 15/212,946, filed on Jul. 18, 2016, granted, now 10,535,544.
Application 15/212,946 is a continuation of application No. 14/717,676, filed on May 20, 2015, granted, now 9,472,435, issued on Oct. 18, 2016.
Claims priority of provisional application 62/028,693, filed on Jul. 24, 2014.
Claims priority of provisional application 62/028,260, filed on Jul. 23, 2014.
Prior Publication US 2020/0152500 A1, May 14, 2020
Int. Cl. H01L 21/683 (2006.01); H01L 21/67 (2006.01); H05B 1/02 (2006.01); H05B 3/02 (2006.01)
CPC H01L 21/6833 (2013.01) [H01L 21/67103 (2013.01); H01L 21/67248 (2013.01); H01L 21/6831 (2013.01); H05B 1/023 (2013.01); H05B 1/0233 (2013.01); H05B 3/02 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method for controlling a temperature of a support surface on a substrate support assembly, the method comprising:
applying power to a main resistive heater formed in a substrate support wherein the power is supplied to achieve a desired temperature profile for the support surface;
measuring the temperature profile of the substrate support surface with one or more temperature sensors;
comparing the temperature profile to a desired temperature profile;
creating a temperature profile map for the support surface in response to the comparison of the temperature profile to the desired temperature map; and
controlling power to a plurality of spatially tunable heaters in accordance with the temperature profile map, wherein the spatially tunable heaters are coupled through a tuning heater controller to a single power supply, the single power supply providing power to each combination of spatially tunable heaters, wherein each combination of spatially tunable heaters are individually and independently controlled with respect to every other spatially tunable heater by the tuning heater controller.