CPC H01L 21/67276 (2013.01) [G05B 19/4187 (2013.01); G05B 19/41875 (2013.01)] | 15 Claims |
1. A method comprising:
generating, by a processing system comprising a memory and a processing device, a queue of a plurality of operations in a sequence recipe, the plurality of operations being associated with substrate processing;
sorting, by the processing system, the plurality of operations in the queue based on a plurality of completion times corresponding to the plurality of operations; and
for each operation of the plurality of operations in the queue, obtaining a next operation in the queue and setting a virtual time axis to time leap to a corresponding completion time of the next operation until each operation of the plurality of operations in the queue are completed to generate a schedule for the sequence recipe, the method further comprising one or more of:
causing, based on the schedule, one or more processing chambers of a substrate processing system to be prepared for one or more corresponding processing operations; or
causing performance of a corrective action based on the schedule.
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