US 12,009,237 B2
Sequencer time leaping execution
Chongyang Wang, Saratoga, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 2, 2022, as Appl. No. 17/902,688.
Application 17/902,688 is a continuation of application No. 16/911,244, filed on Jun. 24, 2020, granted, now 11,437,254.
Prior Publication US 2022/0415682 A1, Dec. 29, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/67 (2006.01); G05B 19/418 (2006.01)
CPC H01L 21/67276 (2013.01) [G05B 19/4187 (2013.01); G05B 19/41875 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method comprising:
generating, by a processing system comprising a memory and a processing device, a queue of a plurality of operations in a sequence recipe, the plurality of operations being associated with substrate processing;
sorting, by the processing system, the plurality of operations in the queue based on a plurality of completion times corresponding to the plurality of operations; and
for each operation of the plurality of operations in the queue, obtaining a next operation in the queue and setting a virtual time axis to time leap to a corresponding completion time of the next operation until each operation of the plurality of operations in the queue are completed to generate a schedule for the sequence recipe, the method further comprising one or more of:
causing, based on the schedule, one or more processing chambers of a substrate processing system to be prepared for one or more corresponding processing operations; or
causing performance of a corrective action based on the schedule.