US 12,009,188 B2
Rotatable faraday cleaning apparatus and plasma processing system
Haiyang Liu, Jiangsu (CN); Dongdong Hu, Jiangsu (CN); Xiaobo Liu, Jiangsu (CN); Na Li, Jiangsu (CN); Shiran Cheng, Jiangsu (CN); Song Guo, Jiangsu (CN); Zhihao Wu, Jiangsu (CN); and Kaidong Xu, Jiangsu (CN)
Assigned to JIANGSU LEUVEN INSTRUMENTS CO., LTD, Jiangsu (CN)
Appl. No. 17/626,496
Filed by JIANGSU LEUVEN INSTRUMENTS CO., LTD, Jiangsu (CN)
PCT Filed Feb. 28, 2020, PCT No. PCT/CN2020/077309
§ 371(c)(1), (2) Date Jan. 12, 2022,
PCT Pub. No. WO2021/134890, PCT Pub. Date Jul. 8, 2021.
Claims priority of application No. 201911413106.3 (CN), filed on Dec. 31, 2019.
Prior Publication US 2022/0297168 A1, Sep. 22, 2022
Int. Cl. H01J 37/32 (2006.01); B08B 9/00 (2006.01); B08B 13/00 (2006.01)
CPC H01J 37/32862 (2013.01) [B08B 9/00 (2013.01); B08B 13/00 (2013.01); H01J 2237/334 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A rotatable faraday cleaning apparatus for a plasma processing system, comprising:
a reactor cavity main body;
a bias electrode mounted at a lower side inside the reactor cavity main body; and
a rotatable cleaning mechanism disposed at an upper side above the reactor cavity main body,
wherein the rotatable cleaning mechanism comprises:
a cavity cover assembled at the upper side above the reactor cavity main body,
a coupling window mounted at an upper side of the cavity cover,
a gas intake nozzle provided at a central part of the coupling window,
a long-petalled assembly and a short-petalled assembly assembled at an outer side of the gas intake nozzle,
a first sector-shaped conductor and a second sector-shaped conductor assembled at the outer side of the gas intake nozzle,
a connecting rod assembled at a left side of the long-petalled assembly,
an eccentric wheel assembled at a front side of the connecting rod, and
a motor mounted at an upper side of the eccentric wheel.