US 12,009,181 B2
Match efficiency-variation compensation
Denis Shaw, Fort Collins, CO (US); Holger Philipp Kley, Fort Collins, CO (US); and Suryan Emani, San Jose, CA (US)
Assigned to Advanced Energy Industries, Inc., Denver, CO (US)
Filed by Advanced Energy Industries, Inc., Fort Collins, CO (US)
Filed on Nov. 11, 2021, as Appl. No. 17/524,659.
Claims priority of provisional application 63/113,154, filed on Nov. 12, 2020.
Prior Publication US 2022/0181121 A1, Jun. 9, 2022
Int. Cl. H03H 7/40 (2006.01); H01J 37/32 (2006.01); H03H 7/38 (2006.01)
CPC H01J 37/32183 (2013.01) [H03H 7/38 (2013.01); H03H 7/40 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A system comprising:
a generator;
a match network u comprising:
an input coupled to the generator;
an output configured for electrical coupling to a plasma load within a plasma chamber; and
variable reactance components with variable positions described by states, C1 to CK;
an operation model, E_u(C,f), characterizing a deviation from nominal of the match network u over its operating range, the operation model, E_u(C,f), having parameters, p1 to pL, determined via calibration using one or more golden load fixtures, the states, C1 to CK, and one or more generator frequencies, f;
a correction component configured to, during a processing recipe of the generator and the match network u:
access an operating frequency, f′, of the generator;
access the states, C1 to CK, after the match network u has been tuned for the plasma load;
input the operating frequency, f′, as well as the states, C1 to CK, to the operation model, E_u(C,f), to generate a correction factor ε; and
instruct the generator and/or match network u to adjust based on the correction factor ε.