| CPC G06F 16/285 (2019.01) [G06N 5/04 (2013.01); G06N 20/00 (2019.01)] | 10 Claims |
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1. A data processing method comprising:
processing a substrate using a substrate processing device;
acquiring a plurality of time series data acquired by the substrate processing device;
acquiring evaluation values of the plurality of time series data;
classifying each of the plurality of time series data into one of a plurality of classifications based on a corresponding one of the evaluation values;
extracting, as extracted time series data, time series data corresponding to a particular classification of the plurality of classifications and representing an abnormal evaluation value based on a result obtained in the classifying, except time series data corresponding to any of the rest of the plurality of classifications other than the particular classification; and
classifying the extracted time series data of the plurality of time series data into one of a plurality of clusters through clustering processing,
wherein the substrate is a semiconductor wafer having a disc shape,
in the acquiring of the evaluation values, the evaluation values of the plurality of time series data are acquired through comparison between the plurality of time series data and reference data.
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