US 12,007,797 B2
Flow rate control device and flow rate control method
Katsuyuki Sugita, Osaka (JP); Kouji Nishino, Osaka (JP); Naofumi Yasumoto, Osaka (JP); Kaoru Hirata, Osaka (JP); Shinya Ogawa, Osaka (JP); and Keisuke Ideguchi, Osaka (JP)
Assigned to FUJIKIN INCORPORATED, Osaka (JP)
Filed by FUJIKIN INCORPORATED, Osaka (JP)
Filed on Jul. 3, 2023, as Appl. No. 18/346,434.
Application 18/346,434 is a continuation of application No. 16/970,278, granted, now 11,733,721, previously published as PCT/JP2019/005638, filed on Feb. 15, 2019.
Claims priority of application No. 2018-032604 (JP), filed on Feb. 26, 2018.
Prior Publication US 2023/0359228 A1, Nov. 9, 2023
Int. Cl. G05D 7/06 (2006.01); F16K 31/00 (2006.01); G01F 1/36 (2006.01); G05B 15/02 (2006.01)
CPC G05D 7/0623 (2013.01) [F16K 31/004 (2013.01); G05B 15/02 (2013.01); G05D 7/0635 (2013.01); G01F 1/363 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A flow rate control device comprising:
a control valve provided in a flow path;
a flow rate measurement unit for measuring a flow rate of a fluid controlled by the control valve; and
a controller,
wherein the controller controls the opening/closing operation of the control valve to match a measured integral flow rate obtained based on a signal output from the flow rate measurement unit to a target integral flow rate for a pulsed gas supply, and
wherein the controller includes a difference calculation unit for calculating an integral flow rate difference that is a sum of differences between a ramp control signal generated as an internal command signal according to a set flow rate signal and a signal output from the flow rate measurement unit in a flow rate rise period, and the controller can change a slope of the ramp control signal during the flow rate rise period based on the output of the difference calculation unit.