CPC G03F 7/7085 (2013.01) [G01B 11/02 (2013.01); G01B 11/0625 (2013.01); G01N 21/4788 (2013.01); G01N 21/9501 (2013.01); G03F 7/70158 (2013.01); G03F 7/705 (2013.01); G03F 7/70625 (2013.01); G03F 7/70633 (2013.01); G03F 9/7088 (2013.01); G01B 2210/56 (2013.01)] | 20 Claims |
1. An apparatus for determining a characteristic of interest relating to at least one structure on a substrate, the apparatus comprising:
an illumination branch comprising a radiation source and configured to direct illumination radiation at the substrate;
a detection branch comprising a detector and configured to detect scattered radiation from the at least one structure on the substrate; and
a processor configured to:
computationally determine phase and amplitude information from an electric field of the scattered radiation in a measurement acquisition, and
computationally re-image the measurement acquisition of the at least one structure subsequent to a measurement to obtain at least one computationally re-imaged image,
wherein computationally re-imaging the measurement acquisition comprises digitally altering an apodization of the illumination radiation for the measurement acquisition, and
wherein digitally altering the apodization is based on the at least one structure.
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