US 12,007,693 B2
Laser focussing module
Ruud Antonius Catharina Maria Beerens, Roggel (NL); Nico Johannes Antonius Hubertus Boonen, Geldrop (NL); Stefan Michael Bruno Bäumer, Eindhoven (NL); Tolga Mehmet Ergin, Bietigheim-Bissingen (DE); Andreas Kristian Hopf, Stuttgart (DE); Derk Jan Wilfred Klunder, Geldrop (NL); Martin Anton Lambert, Korb (DE); Stefan Piehler, Stuttgart (DE); Manisha Ranjan, Eindhoven (NL); Frank Bernhard Sperling, Nuenen (NL); Andrey Sergeevich Tychkov, Eindhoven (NL); Jasper Witte, Eindhoven (NL); and Jiayue Yuan, Eindhoven (NL)
Assigned to ASML Netherlands B. V., Veldhoven (NL); and Trumpf Lasersystems For Semiconductor Manufacturing GmbH, Ditzingen (DE)
Appl. No. 17/600,763
Filed by ASML Netherlands B.V., Veldhoven (NL); and Trumpf Lasersystems For Semiconductor Manufacturing GmbH, Ditzingen (DE)
PCT Filed Apr. 3, 2020, PCT No. PCT/EP2020/059614
§ 371(c)(1), (2) Date Oct. 1, 2021,
PCT Pub. No. WO2020/201530, PCT Pub. Date Oct. 8, 2020.
Claims priority of application No. 19167261 (EP), filed on Apr. 4, 2019.
Prior Publication US 2022/0206397 A1, Jun. 30, 2022
Int. Cl. G03F 7/00 (2006.01); H01S 3/00 (2006.01); H05G 2/00 (2006.01)
CPC G03F 7/70033 (2013.01) [H01S 3/0071 (2013.01); H05G 2/008 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A laser focusing system comprising:
a first curved mirror configured to receive a laser beam from a beam delivery system and generate a first reflected laser beam; and
a second curved mirror configured to receive the first reflected laser beam and generate a second reflected laser beam,
wherein the second reflected laser beam is focused onto a target location in a vessel of an EUV radiation source, wherein the vessel comprises a collector mirror,
wherein an angle between an optical axis of the second reflected laser beam and a horizontal axis is smaller than 25 degrees,
wherein the horizontal axis is defined by the optical axis of the collector mirror,
wherein the laser beam is received by one or more additional mirrors that redirect the laser beam towards the first curved mirror; and
wherein the one or more additional mirrors are configured to overcome a difference in location between the received laser beam and the redirected laser beam, and to translate the laser beam in a substantially vertical direction.