US 12,007,555 B2
MEMS device with a dual hinge structure
Wenlin Jin, Ottawa (CA); Maziar Moradi, Ottawa (CA); Gonzalo Wills, Ottawa (CA); and Stephen Bagnald, Ottawa (CA)
Assigned to Lumentum Operations LLC, San Jose, CA (US)
Filed by Lumentum Operations LLC, San Jose, CA (US)
Filed on Aug. 28, 2020, as Appl. No. 16/948,051.
Claims priority of provisional application 63/040,646, filed on Jun. 18, 2020.
Prior Publication US 2021/0396993 A1, Dec. 23, 2021
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); G01S 7/481 (2006.01); H02N 1/00 (2006.01)
CPC G02B 26/0841 (2013.01) [B81B 3/0045 (2013.01); G01S 7/4817 (2013.01); H02N 1/008 (2013.01); B81B 2201/033 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0154 (2013.01); B81B 2203/0307 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A micro-electro-mechanical system (MEMS) device, comprising:
a first layer that includes a set of stator comb actuators;
a second layer that includes a set of rotor comb actuators and a first set of hinges; and
a third layer that includes a second set of hinges, wherein:
the second layer is adjacent to the first layer and the third layer is adjacent to the second layer,
the first set of hinges and the second set of hinges are configured to tilt a mirror structure about a first axis of the MEMS device,
wherein a driving torque to tilt the mirror structure about the first axis of the MEMS device via the first set of hinges and the second set of hinges is caused by a stator comb actuator, of the set of stator comb actuators, engaging with a rotor comb actuator, of the set of rotor comb actuators,
the first set of hinges is configured to resist a lateral linear force on the mirror structure in a direction associated with the first axis caused by the stator comb actuator engaging with the rotor comb actuator, and
the second set of hinges is configured to resist an in-plane torque on the mirror structure about a second axis of the MEMS device caused by the stator comb actuator engaging with the rotor comb actuator.