US 12,007,554 B2
Self-aligned vertical comb drive assembly
Wenlin Jin, Ottawa (CA); and Gonzalo Wills, Ottawa (CA)
Assigned to Lumentum Operations LLC, San Jose, CA (US)
Filed by Lumentum Operations LLC, San Jose, CA (US)
Filed on Jun. 30, 2020, as Appl. No. 16/917,399.
Claims priority of provisional application 62/967,930, filed on Jan. 30, 2020.
Prior Publication US 2021/0239966 A1, Aug. 5, 2021
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); H02N 1/00 (2006.01)
CPC G02B 26/0841 (2013.01) [B81B 3/0062 (2013.01); H02N 1/008 (2013.01); B81B 2201/033 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/058 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A vertical comb drive assembly, comprising:
a rotor assembly, comprising:
a rotor anchor attached to a base,
a comb rotor attached to a moveable element, and
a rotor hinge attached to the rotor anchor and attached to the moveable element to enable rotation of the moveable element about a single axis that bisects the moveable element; and
a stator assembly, comprising:
a plate anchor attached to the base,
a plate, wherein the plate forms a comb stator, and
a plate hinge to connect the plate to the plate anchor,
wherein the plate hinge is configured for translating the plate vertically from a first position to a second position,
wherein, in the first position, the comb rotor and the comb stator are both in a first plane, and in the second position, the comb rotor is in the first plane and the comb stator is in a second plane that is parallel to the first plane, and
wherein the comb rotor includes a first set of fingers that interact with a second set of fingers included in the comb stator in at least one of the first position or the second position.