US 12,007,339 B2
Sample holder, system and method
Thomas Anthony Case, Walnut Creek, CA (US); Susan Candell, Lafayette, CA (US); Naomi Kotwal, Dublin, CA (US); Allen Gu, Pleasanton, CA (US); Zheren Wu, San Jose, CA (US); and Wayne Broderick, Pleasanton, CA (US)
Assigned to Carl Zeiss SMT Inc., Pleasanton, CA (US)
Filed by Carl Zeiss SMT Inc., Pleasanton, CA (US)
Filed on Sep. 9, 2021, as Appl. No. 17/470,661.
Application 17/470,661 is a continuation of application No. PCT/US2020/002318, filed on Mar. 17, 2020.
Claims priority of provisional application 62/821,090, filed on Mar. 20, 2019.
Claims priority of application No. 102019120109.8 (DE), filed on Jul. 25, 2019.
Prior Publication US 2021/0404977 A1, Dec. 30, 2021
Int. Cl. G01N 23/04 (2018.01); G01N 23/083 (2018.01)
CPC G01N 23/04 (2013.01) [G01N 23/083 (2013.01); G01N 2223/307 (2013.01); G01N 2223/309 (2013.01); G01N 2223/6113 (2013.01); G01N 2223/6462 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A sample holder, comprising:
a sample placement surface configured to support a sample to position the sample in a first direction of the sample holder;
a first alignment portion configured to align the sample in a second direction of the sample holder;
a second alignment portion configured to align the sample in a third direction of the sample holder;
a first hook portion; and
a fixing element hooked into the first hook portion, the fixing element configured to press the sample against: i) the sample placement surface; ii) the first alignment portion; and iii) the second alignment portion,
wherein the first direction is perpendicular to the second direction, the first direction is perpendicular to the third direction, and the second direction is perpendicular to the third direction.