US 12,007,333 B2
System for inspecting thin glass
Janghoon Lee, Yongin-si (KR); Jin Woo Kim, Hwaseong-si (KR); Cheol Hyun Cho, Hwaseong-si (KR); Jayoung Cho, Yongin-si (KR); and Leegu Han, Yongin-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR); and DIGITAL IMAGING TECHNOLOGY, Gyeonggi-Do (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR); and DIGITAL IMAGING TECHNOLOGY, Hwaseong-si (KR)
Filed on Apr. 26, 2022, as Appl. No. 17/729,344.
Claims priority of application No. 10-2021-0102249 (KR), filed on Aug. 3, 2021.
Prior Publication US 2023/0042179 A1, Feb. 9, 2023
Int. Cl. G01N 21/88 (2006.01); G01N 21/958 (2006.01)
CPC G01N 21/8851 (2013.01) [G01N 21/958 (2013.01); G01N 2021/8867 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A system for inspecting a thin glass to inspect a defect of the thin glass, the system comprising:
a housing including a body and a cover covering an upper surface of the body;
a first shuttle which fixes an edge portion of the thin glass to an upper side thereof and reciprocates from a front end portion of the upper surface of the body to a central portion of the upper surface of the body in a first axis direction;
a first inspection part disposed on the body and which measures a position of the defect formed in the thin glass by taking a picture of the thin glass while moving in a second axis direction perpendicular to the first axis direction, wherein the thin glass is fixed to the first shuttle;
a transport shuttle which separates the thin glass from the first shuttle moved to the central portion and fixes the thin glass on a lower side of the transport shuttle;
a second shuttle which separates the thin glass from the transport shuttle, fixes the thin glass to an upper side of the second shuttle, and reciprocates from the central portion to a rear end portion of the upper surface of the body; and
a second inspection part disposed on the body and spaced apart rearward from the first inspection part and which inspects the position of the defect by taking an enlarged picture of the position of the defect measured by the first inspection part, and
wherein the first shuttle tensions and fixes the thin glass to prevent wrinkling of the thin glass.