CPC G01J 3/0229 (2013.01) [G01J 3/0205 (2013.01); G01J 3/0216 (2013.01); G01J 3/0256 (2013.01); G01J 3/0294 (2013.01); G01J 3/10 (2013.01); G01J 3/108 (2013.01); G01J 3/36 (2013.01); G01J 3/42 (2013.01); G01N 21/25 (2013.01); G01N 21/49 (2013.01); G01N 2021/4711 (2013.01)] | 18 Claims |
1. A system for determining properties of a sample, the system comprising:
one or more light sources that emit light;
a detector array comprising detector pixels;
an illumination optic;
a first optics unit, comprising:
a first substrate; and
a first plurality of collection optics on the first substrate;
a second optics unit, comprising:
a second substrate; and
a second plurality of collection optics on the second substrate; and
one or more multiplexers configured to combine the light received from the one or more light sources, wherein:
the illumination optic receives the light and directs the light toward the sample;
the first plurality of collection optics receive at least a portion of the light that is reflected from the sample;
each optic of the first plurality of collection optics transmits a portion of the light to a respective one of the second plurality of collection optics; and
each optic of the second plurality of collection optics transmits a portion of the light to a respective detector pixel of the detector array.
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