CPC G01D 3/08 (2013.01) [G01K 7/32 (2013.01); G01K 7/343 (2013.01); G01L 9/007 (2013.01); G01L 9/0075 (2013.01); G01L 9/105 (2013.01); G01L 19/04 (2013.01); H01F 17/0006 (2013.01); H01F 41/041 (2013.01); H01G 11/22 (2013.01); G01K 2211/00 (2013.01)] | 11 Claims |
1. A pressure sensor comprising:
a disk-shaped polymer-derived ceramic (PDC) nanocomposite structure comprising walls that define an internal cavity having a first cavity surface and an opposed second cavity surface; and
a ceramic coil inductor disposed on an outer surface of the PDC nanocomposite structure having a first end plate, a coil portion extending circumferentially from the first end plate, and a second end plate, wherein the PDC nanocomposite structure is disposed between the first and second end plates,
wherein the ceramic coil inductor is formed of a ceramic composite that comprises carbon nanotubes, carbon nanofibers, or a combination thereof dispersed in a ceramic matrix, and
wherein the first and second cavity surfaces are spaced a distance from one another.
|