US 12,007,221 B2
Heterogeneous integration detecting method and heterogeneous integration detecting apparatus
Hsiang-Chun Wei, Hsinchu (TW); Chih-Hsiang Liu, Hsinchu County (TW); Yi-Sha Ku, Hsinchu (TW); Chung-Lun Kuo, New Taipei (TW); Chun-Wei Lo, Taichung (TW); and Chieh-Yi Lo, Kaohsiung (TW)
Assigned to Industrial Technology Research Institute, Hsinchu (TW)
Filed by Industrial Technology Research Institute, Hsinchu (TW)
Filed on Dec. 27, 2021, as Appl. No. 17/562,019.
Claims priority of application No. 110143061 (TW), filed on Nov. 18, 2021.
Prior Publication US 2023/0152086 A1, May 18, 2023
Int. Cl. G01B 11/22 (2006.01); G01B 9/02 (2022.01); G01B 9/02015 (2022.01)
CPC G01B 11/22 (2013.01) [G01B 9/0203 (2013.01); G01B 9/02049 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A heterogeneous integration detecting method, comprising:
under a condition of maintaining a same relative distance between a sample and an interference objective lens, continuously adjusting a relative posture of the interference objective lens and the sample according to a change of an image of the sample in a field of view of the interference objective lens, until a first optical axis of the interference objective lens is determined to be substantially perpendicular to a surface of the sample according to the image; and
switching the interference objective lens to an imaging objective lens, and detecting a geometric profile of at least one via of the sample, wherein a second optical axis of the imaging objective lens after replacement overlaps with the first optical axis of the interference objective lens before replacement.