CPC G01B 11/22 (2013.01) [G01B 9/0203 (2013.01); G01B 9/02049 (2013.01)] | 10 Claims |
1. A heterogeneous integration detecting method, comprising:
under a condition of maintaining a same relative distance between a sample and an interference objective lens, continuously adjusting a relative posture of the interference objective lens and the sample according to a change of an image of the sample in a field of view of the interference objective lens, until a first optical axis of the interference objective lens is determined to be substantially perpendicular to a surface of the sample according to the image; and
switching the interference objective lens to an imaging objective lens, and detecting a geometric profile of at least one via of the sample, wherein a second optical axis of the imaging objective lens after replacement overlaps with the first optical axis of the interference objective lens before replacement.
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