US 12,006,591 B2
Method for preparing an aluminum doped silicon carbide crystal by providing a compound including aluminum and oxygen in a capsule comprised of a first and second material
Ilya Zwieback, Township Of Washington, NJ (US); Varatharajan Rengarajan, Flanders, NJ (US); Andrew E. Souzis, Ramsey, NJ (US); and Gary E. Ruland, Morris Plains, NJ (US)
Assigned to II-VI ADVANCED MATERIALS, LLC, Pine Brook, NJ (US)
Filed by II-VI Delaware, Inc., Wilmington, DE (US)
Filed on Sep. 23, 2020, as Appl. No. 17/029,746.
Claims priority of provisional application 62/984,177, filed on Mar. 2, 2020.
Prior Publication US 2021/0269937 A1, Sep. 2, 2021
Int. Cl. C30B 23/02 (2006.01); C01B 32/956 (2017.01); C04B 35/573 (2006.01); C04B 35/65 (2006.01); C30B 29/36 (2006.01); G02F 1/00 (2006.01); H01L 29/36 (2006.01)
CPC C30B 23/02 (2013.01) [C01B 32/956 (2017.08); C04B 35/573 (2013.01); C04B 35/65 (2013.01); C30B 29/36 (2013.01); C04B 2235/3205 (2013.01); C04B 2235/3826 (2013.01); C04B 2235/3839 (2013.01); C04B 2235/425 (2013.01); C04B 2235/722 (2013.01); C04B 2235/76 (2013.01); C04B 2235/9661 (2013.01); G02F 1/0063 (2013.01); H01L 29/36 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method for preparing an aluminum doped silicon carbide crystal, comprising:
providing a silicon carbide source material and a silicon carbide monocrystalline seed in a growth crucible;
providing a solid aluminum dopant source material comprising a compound including aluminum and oxygen in a capsule; and
heating the growth crucible, with the capsule positioned therein, in a manner effective for producing silicon and carbon bearing vapors from the silicon carbide source material in the growth crucible and aluminum bearing vapors from the solid aluminum dopant source material in the capsule, and for precipitating the silicon and carbon bearing vapors and the aluminum bearing vapors on the silicon carbide monocrystalline seed to grow the aluminum doped silicon carbide crystal;
wherein the capsule includes a first material resistant to degradation from the aluminum dopant source and aluminum bearing vapors and a second material resistant to degradation from the silicon and carbon bearing vapors, the first material being different from the second material, and
wherein the capsule includes an inner component at least partially formed of the first material and an outer component disposed about the inner component and at least partially formed of the second material, wherein the outer component is in the form of an outer crucible, and wherein the inner component is in the form of an inner crucible positioned in the outer crucible.