US 12,006,589 B2
Purification apparatus and method of purifying hot zone parts
Chung-Sheng Chang, Hsinchu (TW); Masami Nakanishi, Hsinchu (TW); Yu-Sheng Su, Hsinchu (TW); Yen-Hsun Chu, Hsinchu (TW); Yung-Chi Wu, Hsinchu (TW); and Yi-Hua Fan, Hsinchu (TW)
Assigned to GLOBALWAFERS CO., LTD., Hsinchu (TW)
Filed by GlobalWafers Co., Ltd., Hsinchu (TW)
Filed on Feb. 24, 2022, as Appl. No. 17/679,576.
Claims priority of application No. 110106707 (TW), filed on Feb. 25, 2021.
Prior Publication US 2022/0267923 A1, Aug. 25, 2022
Int. Cl. C30B 13/14 (2006.01); C30B 13/16 (2006.01)
CPC C30B 13/16 (2013.01) [C30B 13/14 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A purification apparatus, which is configured to remove impurities attached on at least one hot zone part, the purification apparatus comprising:
a crystal high temperature furnace including a furnace body, a furnace cover mounted on the furnace body, and a thermal field module disposed in the furnace body;
an enclosed box disposed in the thermal field module and including a box body and a box cover detachably mounted on the box body, wherein the box body is configured to accommodate the at least one hot zone part;
an outer tube passing through the furnace cover and including a first outer tube opening, a second outer tube opening, and a third outer tube opening, wherein the first outer tube opening and the second outer tube opening are spaced apart from a side of the furnace cover, the side of the furnace cover is distant from the furnace body, and the third outer tube opening is connected to the box cover;
an inner tube disposed within the outer tube and spaced apart from an inner side of the outer tube, wherein the inner tube includes a first inner tube opening and a second inner tube opening; and
a gas inlet cover connected to the first outer tube opening and configured to input a noble gas into the enclosed box through the inner tube, wherein the thermal field module is configured to heat the noble gas in the enclosed box so that the impurities are heated and vaporized through the noble gas.