US 12,006,572 B2
Reactor system including a gas distribution assembly for use with activated species and method of using same
Xing Lin, Chandler, AZ (US); Peipei Gao, Tempe, AZ (US); Prajwal Nagaraj, Tempe, AZ (US); Mingyang Ma, Phoenix, AZ (US); Wentao Wang, Phoenix, AZ (US); Ion Hong Chao, Gilbert, AZ (US); Alexandros Demos, Scottsdale, AZ (US); Paul Ma, Scottsdale, AZ (US); and Hichem M'Saad, Paradise Valley, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Oct. 1, 2020, as Appl. No. 17/060,507.
Claims priority of provisional application 62/912,511, filed on Oct. 8, 2019.
Prior Publication US 2021/0102292 A1, Apr. 8, 2021
Int. Cl. H01J 37/32 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); C23C 16/50 (2006.01)
CPC C23C 16/45582 (2013.01) [C23C 16/403 (2013.01); C23C 16/405 (2013.01); C23C 16/45536 (2013.01); C23C 16/45565 (2013.01); C23C 16/50 (2013.01); H01J 37/32357 (2013.01); H01J 37/3244 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A reactor system comprising:
a first reaction chamber;
a first gas source;
a second gas source;
a first remote plasma unit fluidly coupled to the first reaction chamber;
a gas transport line connected to the first remote plasma unit;
a first gas line connected to the gas transport line;
a second gas transport line connected to the gas transport line;
a gas distribution assembly that receives activated species from the first remote plasma unit; and
a transport path between the first remote plasma unit and the gas distribution assembly,
wherein the gas distribution assembly comprises:
a top section with a singular inlet;
a gas distribution device coupled to the top section, wherein the gas distribution device comprises a plurality of radially extending channels defined between the top section and an upper surface of the gas distribution device, wherein the gas distribution device comprises one or more holes defined within a lower surface of the gas distribution device;
a gas expansion area fluidly coupled to the singular inlet by the radially extending channels and each of the one or more holes defined within the lower surface of the gas distribution device; and
a showerhead plate downstream of the gas distribution device and the expansion area,
wherein the gas distribution device distributes the activated species within the gas expansion area, and
wherein the transport path is cooled.