US 12,006,571 B2
Atomic layer deposition apparatus for coating on fine powders
Jing-Cheng Lin, Hsinchu County (TW); Ching-Liang Yi, Hsinchu County (TW); Jung-Hua Chang, Hsinchu County (TW); and Chia-Cheng Ku, Hsinchu County (TW)
Assigned to SKY TECH INC., Hsinchu County (TW)
Filed by SKY TECH INC., Hsinchu County (TW)
Filed on Mar. 11, 2021, as Appl. No. 17/199,292.
Claims priority of application No. 109134658 (TW), filed on Oct. 6, 2020.
Prior Publication US 2022/0106684 A1, Apr. 7, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 16/455 (2006.01); C23C 16/44 (2006.01); H01L 33/00 (2010.01)
CPC C23C 16/45544 (2013.01) [C23C 16/4417 (2013.01); H01L 33/00 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An atomic layer deposition apparatus for coating on fine powders, comprising:
a vacuum chamber, comprising a reaction space for accommodating a plurality of fine powders;
a shaft sealing device, comprising an outer tube and an inner tube, wherein the outer tube comprises an accommodating space for accommodating the inner tube, and the inner tube comprises a connection space;
a driving unit, connected to the vacuum chamber through the outer tube of the shaft sealing device, for driving the vacuum chamber to rotate relative to the inner tube through the outer tube;
at least one air extraction line, disposed in the connection space of the inner tube and fluidly connected to the reaction space of the vacuum chamber, for extracting a gas from the reaction space;
at least one air intake line, disposed in the connection space of the inner tube and fluidly connected to the reaction space of the vacuum chamber, for transporting a precursor or a non-reactive gas to the reaction space, wherein the non-reactive gas blows the fine powders around in the reaction space; and
at least one mount bracket and a support base connected to the mount bracket through at least one connecting shaft;
wherein the driving unit, the vacuum chamber, and the shaft sealing device are disposed on the support base, and the support base rotates relative to the mount bracket with the connecting shaft as axis to change an inclination angle of the driving unit, the vacuum chamber, and the shaft sealing device;
wherein when the driving unit drives the outer tube and the vacuum chamber to rotate, the inner tube, the at least one air extraction line in the connection space of the inner tube, and the at least one air intake line in the connection space of the inner tube stay stationary.