US 12,006,564 B2
Cubic Al-rich AlTiN coatings deposited from ceramic targets
Siva Phani Kumar Yalamanchili, Sargans (CH); Denis Kurapov, Walenstadt (CH); Tomoya Sasaki, Yasu (JP); and Kazuyuki Kubota, Yasu (JP)
Assigned to Oerlikon Surface Solutions AG, Pfäffikon, Pfäffikon (CH); and MOLDINO Tool Engineering, Ltd., Tokyo (JP)
Appl. No. 17/291,841
Filed by Oerlikon Surface Solutions AG, Pfäffikon, Pfäffikon (CH); and MOLDINO Tool Engineering, Ltd., Tokyo (JP)
PCT Filed Nov. 11, 2019, PCT No. PCT/EP2019/080809
§ 371(c)(1), (2) Date May 6, 2021,
PCT Pub. No. WO2020/094882, PCT Pub. Date May 14, 2020.
Claims priority of provisional application 62/757,954, filed on Nov. 9, 2018.
Prior Publication US 2021/0395875 A1, Dec. 23, 2021
Int. Cl. C23C 14/06 (2006.01); C23C 14/34 (2006.01)
CPC C23C 14/0617 (2013.01) [C23C 14/345 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A non-reactive PVD coating process for producing an aluminium-rich AlxTi1−xN-based thin film having an aluminium content of >75 at-% based on the total amount of aluminium and titanium in the thin film, a cubic crystal structure, and a columnar microstructure, wherein ceramic targets are used as a material source for the aluminium-rich AlxTi1−xN-based thin film.