CPC C09D 11/102 (2013.01) [C09D 11/00 (2013.01); C09D 11/02 (2013.01); C09D 11/037 (2013.01); C09D 17/007 (2013.01); C09D 17/008 (2013.01); G03F 7/0002 (2013.01); H01L 31/02327 (2013.01); H01L 31/0543 (2014.12); H01L 33/58 (2013.01); G01J 1/0407 (2013.01); H01L 2933/0058 (2013.01); Y02E 10/52 (2013.01)] | 12 Claims |
1. An imprinting ink composition for nanoimprinting lithography, comprising:
a solvent;
polymerizable content dissolved and/or dispersed in the solvent, the polymerizable content comprising transition metal oxide particles in a high concentration, forming at least 80% by weight of the total weight of the polymerizable content for increasing a refractive index of pattern layers formed from the imprinting ink composition, the polymerizable content forming 2-25% by weight based on the total weight of the imprinting ink composition; and
a polymerization inhibitor of Formula 1 present in a range of 0.1-3.0% by weight based on the total weight of the imprinting ink composition sufficient for preventing premature polymerization of the polymerizable content resulting from the high concentration of the transition metal oxide particles:
wherein in Formula 1, R1 is hydrogen, C1-C4 alkyl or —(—C2H5—O—)n—R13, wherein n is 1, 2 or 3 and R13 is a C1-C3 alkyl; R2 and R3 individually are selected from hydrogen or C1-C4 alkyl and m is 0, 1, 2 or 3; and
an ammonia solution present in a range of 10-40% by weight based on the total weight of the imprinting ink composition sufficient for increasing a pH of the imprinting ink composition to a range of 1-2.5 to reduce corrosion of substrate material of a patterned elastomeric stamp used to imprint layers formed of the imprinting ink composition.
|