US 12,006,251 B2
Micro-optical element having high bonding strength between glass substrate and micro-structure layer
Huiyan Fan, Jiangsu (CN); Yanquan Shan, Jiangsu (CN); Guangjun Zhang, Shanghai (CN); and Weizhi Deng, Jiangsu (CN)
Assigned to SCHOTT GLASS TECHNOLOGIES (SUZHOU) CO. LTD., Jiangsu (CN)
Filed by SCHOTT Glass Technologies (Suzhou) Co. Ltd., Jiangsu (CN)
Filed on Sep. 4, 2020, as Appl. No. 17/012,183.
Application 17/012,183 is a continuation of application No. PCT/CN2019/104774, filed on Sep. 6, 2019.
Prior Publication US 2021/0070654 A1, Mar. 11, 2021
Int. Cl. C03C 3/078 (2006.01); C03C 3/097 (2006.01); C03C 3/108 (2006.01); C03C 17/32 (2006.01); C03C 19/00 (2006.01)
CPC C03C 19/00 (2013.01) [C03C 3/078 (2013.01); C03C 3/097 (2013.01); C03C 3/108 (2013.01); C03C 17/326 (2013.01); C03C 2204/08 (2013.01); C03C 2217/90 (2013.01); C03C 2218/112 (2013.01); C03C 2218/116 (2013.01); C03C 2218/32 (2013.01)] 24 Claims
 
1. A micro-optical element comprising:
a glass substrate;
a microstructure layer of polymer imprinted on the glass substrate; and
a bonding strength between the microstructure layer and the glass substrate that is higher than 0.5 MPa,
wherein the glass substrate has a thickness less than or equal to 1500 μm, a Total Thickness Variation (TTV) less than or equal to 40 μm, and a thickness tolerance of less than or equal to 80 μm.