US 12,005,446 B2
High throughput compact microfluidic cell counter
Mukhles Sowwan, Cupertino, CA (US); and Samer Banna, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Oct. 20, 2021, as Appl. No. 17/505,628.
Claims priority of provisional application 63/104,801, filed on Oct. 23, 2020.
Prior Publication US 2022/0126291 A1, Apr. 28, 2022
Int. Cl. B01L 3/00 (2006.01); G01N 15/10 (2024.01); G01N 15/1031 (2024.01)
CPC B01L 3/502715 (2013.01) [G01N 15/1031 (2013.01); B01L 2300/0645 (2013.01); B01L 2300/0858 (2013.01); B01L 2300/0864 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An apparatus for counting cells in a liquid sample, comprising:
a flow-splitting chamber fluidly coupled to a collection chamber;
an input tube configured to deliver a liquid sample containing cells to the flow-splitting chamber;
a spaced apart array of posts arranged in the flow-splitting chamber in a plurality of rows of posts along a flow path to define a plurality of channels therebetween and configured to redirect the liquid sample into a plurality of streams corresponding to the number of channels defined by a last row of posts in the plurality of rows of posts;
a plurality of sensing zones corresponding to the plurality of streams; and
a plurality of sensing electrodes, wherein each sensing electrode is disposed in a corresponding sensing zone of the plurality of sensing zones and configured to detect a change in electrical impedance as cells in the liquid sample flow through the plurality of sensing zones.