US 12,329,043 B2
Superconducting circuit including superconducting qubits
Hao Deng, Hangzhou (CN)
Assigned to Alibaba Group Holding Limited, Grand Cayman (KY)
Filed by ALIBABA GROUP HOLDING LIMITED, Grand Cayman (KY)
Filed on Aug. 9, 2023, as Appl. No. 18/446,861.
Application 18/446,861 is a division of application No. 17/937,160, filed on Sep. 30, 2022, granted, now 11,825,752.
Application 18/446,861 is a division of application No. 16/880,270, filed on May 21, 2020, granted, now 11,489,101, issued on Nov. 1, 2022.
Claims priority of application No. 201910492823.3 (CN), filed on Jun. 6, 2019.
Prior Publication US 2024/0090347 A1, Mar. 14, 2024
Int. Cl. H10N 60/80 (2023.01); G06N 10/40 (2022.01); H10N 60/01 (2023.01); H10N 60/12 (2023.01)
CPC H10N 60/805 (2023.02) [G06N 10/40 (2022.01); H10N 60/0912 (2023.02); H10N 60/12 (2023.02)] 11 Claims
OG exemplary drawing
 
1. A method for preparing a superconducting circuit, comprising:
covering a first area with a first photoresist and covering a second area with a second photoresist, wherein the first area comprises an area where a superconducting qubit of the superconducting circuit is located, the second area comprises an area where a part of the superconducting circuit is located, and the second photoresist covers the first photoresist;
performing lithography on the second photoresist to form the part of the superconducting circuit, and to expose the first photoresist covered by the second photoresist;
performing lithography on the exposed first photoresist to form the superconducting qubit;
depositing a superconducting material on the first area and the second area; and
removing the first photoresist and the second photoresist to obtain the superconducting circuit, wherein the superconducting qubit and the part of the superconducting circuit are connected via a superconducting layer formed by the deposited superconducting material.