US 12,329,033 B2
Piezoelectric sensor with increased sensitivity and devices having the same
You Qian, Singapore (SG); Humberto Campanella-Pineda, Singapore (SG); Guofeng Chen, Fremont, CA (US); and Rakesh Kumar, Singapore (SG)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on Oct. 18, 2022, as Appl. No. 18/047,443.
Claims priority of provisional application 63/262,823, filed on Oct. 21, 2021.
Claims priority of provisional application 63/262,825, filed on Oct. 21, 2021.
Prior Publication US 2023/0125523 A1, Apr. 27, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H10N 30/08 (2023.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H04R 3/00 (2006.01); H04R 7/10 (2006.01); H04R 17/02 (2006.01); H10N 30/30 (2023.01); H10N 30/87 (2023.01)
CPC H10N 30/08 (2023.02) [B81B 3/0018 (2013.01); B81C 1/0015 (2013.01); H04R 3/005 (2013.01); H04R 7/10 (2013.01); H04R 17/02 (2013.01); H10N 30/302 (2023.02); H10N 30/306 (2023.02); H10N 30/87 (2023.02); B81B 2201/0257 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0307 (2013.01); B81B 2203/04 (2013.01); B81B 2207/01 (2013.01); H04R 2201/003 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A piezoelectric sensor, comprising:
a substrate;
a cantilever beam having a proximal portion attached to the substrate and extending to an unsupported distal end of the beam; and
an electrode disposed on or in the proximal portion of the beam, the electrode having an outer boundary with a shape substantially corresponding to a contour line of a strain distribution plot for the cantilever beam resulting from a force applied to the cantilever beam.
 
7. A piezoelectric microelectromechanical systems microphone, comprising:
a substrate; and
a plurality of piezoelectric sensors movably coupled to the substrate, each of the piezoelectric sensors spaced apart from an adjacent piezoelectric sensor by a gap and including: a cantilever beam having a proximal portion attached to the substrate and extending to an unsupported distal end of the beam, and an electrode disposed on or in the proximal portion of the beam, the electrode having an outer boundary with a shape substantially corresponding to a contour line of a strain distribution plot for the cantilever beam resulting from a force applied to the cantilever beam, the plurality of piezoelectric sensors configured to deflect when subjected to sound pressure.