US 12,328,807 B2
Vaporizer, ion source and method for generating aluminum-containing vapor
George Sacco, Groveland, MA (US); Michael Crovo, Saugus, MA (US); and Sami K. Hahto, Nashua, NH (US)
Assigned to NISSIN ION EQUIPMENT CO., LTD., Koka (JP)
Filed by NISSIN ION EQUIPMENT CO., LTD., Koka (JP)
Filed on Sep. 15, 2022, as Appl. No. 17/945,705.
Prior Publication US 2024/0098869 A1, Mar. 21, 2024
Int. Cl. H05H 1/42 (2006.01); H01J 27/08 (2006.01); H01J 49/10 (2006.01)
CPC H05H 1/42 (2013.01) [H01J 27/08 (2013.01); H01J 49/105 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An ion source comprising:
a vaporizer comprising:
a crucible containing an aluminum-containing material, the crucible comprising a gas inlet and a vapor outlet; and
a heater configured to heat the crucible;
an arc chamber configured to generate a plasma therein; and
a heat shield,
wherein the vapor outlet is configured to output vapor into the arc chamber through a wall of the arc chamber, and
wherein the heat shield is provided between the vaporizer and the wall of the arc chamber.