| CPC H05G 2/007 (2024.08) [H01S 3/0903 (2013.01); H05G 2/0084 (2024.08); H05G 2/0086 (2024.08)] | 20 Claims |

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1. Alight source system comprising:
a first kicker configured to:
receive an input electron beam comprising a plurality of electron bunches; and
deflect electron bunches of the electron beam substantially within a first plane, thereby spatially separating the input electron beam into a first plurality of electron beams;
a second kicker configured to:
receive the first plurality of electron beams; and
deflect electron bunches of the first plurality of electron beams substantially within a second plane, thereby spatially separating the first plurality of electron beams into a second plurality of electron beams;
a first septum configured to:
receive a first subset of the second plurality of electron beams; and
deflect electron beams of the first subset substantially within the first plane; and
a second septum configured to:
receive a second subset of the second plurality of electron beams; and
deflect electron beams of the second subset substantially within the second plane.
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