US 12,328,081 B2
Energy harvesting devices and sensors, and methods of making and use thereof
Paul Thibado, Fayetteville, AR (US)
Assigned to Board of Trustees of the University of Arkansas, Little Rock, AR (US)
Filed by Board of Trustees of the University of Arkansas, Little Rock, AR (US)
Filed on May 30, 2019, as Appl. No. 16/427,023.
Claims priority of provisional application 62/741,234, filed on Oct. 4, 2018.
Claims priority of provisional application 62/677,826, filed on May 30, 2018.
Prior Publication US 2019/0386584 A1, Dec. 19, 2019
Int. Cl. H02N 2/18 (2006.01); B81B 3/00 (2006.01); H01L 41/113 (2006.01); H01M 10/052 (2010.01); H02N 1/08 (2006.01); H10N 30/30 (2023.01); H10N 30/85 (2023.01); H10N 35/85 (2023.01)
CPC H02N 2/186 (2013.01) [B81B 3/0021 (2013.01); H01M 10/052 (2013.01); H02N 1/08 (2013.01); H02N 2/181 (2013.01); H10N 30/308 (2023.02); H10N 30/85 (2023.02); H10N 35/85 (2023.02)] 18 Claims
OG exemplary drawing
 
1. A system for harvesting energy, comprising:
a substrate having an initial thickness between a first face of the substrate and an opposite face of the substrate;
a second face of the substrate bounding an open well region extending from the first face of the substrate toward the second face of the substrate;
a free-standing membrane positioned over the well region and supported by the first face of the substrate, wherein the free-standing membrane is free to vibrate in response to ambient energy, wherein vibration of the membrane defines cyclical ripple formations along a first surface of the membrane, wherein each ripple formation alternates between a peak and a trough over the well region;
a tip structure extending from the second face of the substrate;
a first contact connected to the first face of the substrate;
a second contact connected to the tip structure;
a voltage source connected to the second contact inducing a capacitive region of charges between the tip and the membrane,
wherein a distance between the tip and the membrane varies with respective peaks and troughs, and
wherein the capacitive region between the tip and the membrane stores and emits the charges in cycles according to the distance between the tip and the membrane; and
a storage capacitor connected to the membrane and receiving emitted charges from the capacitive region when the distance between the tip and the membrane is increasing during ripple peak periods.