US 12,327,981 B2
Vertical cavity surface emitting laser device and method for manufacturing the same
Cheng-Dong Wang, Shenzhen (CN)
Assigned to TRIPLE WIN TECHNOLOGY(SHENZHEN) CO. LTD., Shenzhen (CN)
Filed by TRIPLE WIN TECHNOLOGY(SHENZHEN) CO. LTD., Shenzhen (CN)
Filed on Mar. 8, 2022, as Appl. No. 17/689,079.
Claims priority of application No. 202120521977.3 (CN), filed on Mar. 12, 2021.
Prior Publication US 2022/0294185 A1, Sep. 15, 2022
Int. Cl. H01S 5/042 (2006.01); H01S 5/02335 (2021.01); H01S 5/02355 (2021.01); H01S 5/183 (2006.01)
CPC H01S 5/04257 (2019.08) [H01S 5/02335 (2021.01); H01S 5/02355 (2021.01); H01S 5/04254 (2019.08); H01S 5/18308 (2013.01); H01S 2301/176 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A vertical cavity surface emitting laser (VCSEL) device, comprising:
an epitaxial layer being rectangular which comprising a first surface, a second surface opposite to the first surface, and four sidewalls connected to the first surface and the second surface;
an ohmic contact layer disposed on the first surface;
a negative electrode disposed on a portion of the second surface;
a first insulating layer disposed on a portion of the second surface without the negative electrode, and extending to the ohmic contact layer along each of the four sidewalls;
a positive electrode disposed on the first insulating layer corresponding to the second surface, the positive electrode and the negative electrode spaced apart, the positive electrode surrounding the negative electrode;
four conductive layers disposed on the first insulating layer corresponding to the four sidewalls; and
an electroplating layer disposed on a surface of each of the four conductive layers away from the first insulating layer;
wherein the positive electrode is connected to the ohmic contact layer through the four conductive layers and the electroplating layer, the negative electrode is spaced from the positive electrode.