US 12,327,975 B2
Chamber device, and electronic device manufacturing method
Junichi Fujimoto, Oyama (JP); Takahiro Tatsumi, Oyama (JP); Kazuki Nagai, Oyama (JP); and Jeffrey P. Sercel, Manchester, NH (US)
Assigned to Gigaphoton Inc., Tochigi (JP)
Filed by Gigaphoton Inc., Tochigi (JP)
Filed on Aug. 10, 2023, as Appl. No. 18/447,514.
Application 18/447,514 is a continuation of application No. PCT/JP2022/003118, filed on Jan. 27, 2022.
Claims priority of provisional application 63/165,576, filed on Mar. 24, 2021.
Prior Publication US 2023/0387641 A1, Nov. 30, 2023
Int. Cl. H01S 3/03 (2006.01); G03F 7/00 (2006.01); H01S 3/04 (2006.01); H01S 3/041 (2006.01)
CPC H01S 3/03 (2013.01) [G03F 7/70025 (2013.01); G03F 7/70891 (2013.01); H01S 3/0405 (2013.01); H01S 3/0407 (2013.01); H01S 3/041 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A chamber device comprising:
an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes;
an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light; and
a partition wall arranged between the inner housing and the outer housing and fixed to the inner housing and the outer housing.