US 12,327,769 B2
Method for managing chip manufacturing equipment, apparatus, electronic device and storage medium
Wang Sheng, Jiangsu (CN)
Assigned to Saimeite Technology Co, Ltd., Jiangsu (CN)
Filed by Saimeite Technology Co., Ltd., Jiangsu (CN)
Filed on Aug. 31, 2022, as Appl. No. 17/900,699.
Claims priority of application No. 202111640249.5 (CN), filed on Dec. 29, 2021.
Prior Publication US 2023/0207400 A1, Jun. 29, 2023
Int. Cl. H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC H01L 22/20 (2013.01) [H01L 21/67109 (2013.01); H01L 21/67276 (2013.01); H01L 21/67766 (2013.01); H01L 22/10 (2013.01); Y02P 90/30 (2015.11)] 9 Claims
OG exemplary drawing
 
1. A method for managing chip manufacturing equipment, the method comprising:
determining, for each furnace tube device in a target area, a processing precision of the furnace tube device, through a heating uniformity result obtained by testing the furnace tube device, a processing test result of a test piece after processed by the furnace tube device, and factory parameters of the furnace tube device;
marking a processing precision label for each furnace tube device according to a processing precision of each furnace tube device;
determining, when it is detected that a first rule is set in a first furnace tube device, at least one second furnace tube device having device capability same as the first furnace tube device in the target area, wherein the first rule comprises: product categories that are allowed to be processed by the furnace tube device, and a processing precision label required for processing each of the product categories;
determining, from the at least one second furnace tube device, a target second furnace tube device having a processing precision label same as that required by the first rule;
determining a priority synchronization sequence of the target second furnace tube device according to a processing precision of each target second furnace tube device; and
synchronizing the first rule in the first furnace tube device to the target second furnace tube device according to the priority synchronization sequence.