US 12,327,762 B2
Molybdenum fill
Lawrence Schloss, Palo Alto, CA (US); Shruti Vivek Thombare, Sunnyvale, CA (US); Zhongbo Yan, Newark, CA (US); Patrick A. Van Cleemput, Duvall, WA (US); and Joshua Collins, Sunnyvale, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/763,529
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed Oct. 14, 2020, PCT No. PCT/US2020/055596
§ 371(c)(1), (2) Date Mar. 24, 2022,
PCT Pub. No. WO2021/076636, PCT Pub. Date Apr. 22, 2021.
Claims priority of provisional application 62/915,492, filed on Oct. 15, 2019.
Prior Publication US 2022/0375792 A1, Nov. 24, 2022
Int. Cl. H01L 21/768 (2006.01); C23C 16/04 (2006.01); C23C 16/06 (2006.01); C23C 16/455 (2006.01); C23C 16/56 (2006.01); H10B 69/00 (2023.01)
CPC H01L 21/76879 (2013.01) [C23C 16/045 (2013.01); C23C 16/06 (2013.01); C23C 16/45553 (2013.01); C23C 16/56 (2013.01); H01L 21/76856 (2013.01); H01L 21/76865 (2013.01); H01L 21/76876 (2013.01); H10B 69/00 (2023.02)] 25 Claims
OG exemplary drawing
 
1. A method comprising:
providing a substrate comprising one or more features, each of the one or more feature having at least one opening and an interior region fluidically accessible through the at least one opening;
depositing a first layer of molybdenum in the one or more features; and
treating the first layer non-conformally such that that the treatment is preferentially applied at portions of the first layer near the at least one opening of the one or more features relative to portions of the first layer that are further in the interior region of the feature.