US 12,327,722 B2
Epitaxial growth device
Liang Zhu, Hangzhou (CN); Wenjie Shen, Hangzhou (CN); Jiancan Zhou, Hangzhou (CN); Jiafeng Cheng, Hangzhou (CN); Qiucheng Zhang, Hangzhou (CN); Linjian Fu, Hangzhou (CN); Jianwei Cao, Hangzhou (CN); and Kui Yang, Hangzhou (CN)
Assigned to ZHEJIANG QIUSHI SEMICONDUCTOR EQUIPMENT CO., LTD, Hangzhou (CN); and ZHEJIANG JINGSHENG M & E CO., LTD, Shaoxing (CN)
Filed by ZHEJIANG QIUSHI SEMICONDUCTOR EQUIPMENT CO., LTD, Hangzhou (CN); and ZHEJIANG JINGSHENG M & E CO., LTD, Shaoxing (CN)
Filed on Jun. 10, 2022, as Appl. No. 17/837,044.
Application 17/837,044 is a continuation of application No. PCT/CN2022/077689, filed on Feb. 24, 2022.
Claims priority of application No. 202110606879.4 (CN), filed on Jun. 1, 2021.
Prior Publication US 2022/0384192 A1, Dec. 1, 2022
Int. Cl. C30B 25/10 (2006.01); C23C 16/46 (2006.01); H01L 21/02 (2006.01)
CPC H01L 21/02365 (2013.01) [C23C 16/46 (2013.01); C30B 25/10 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An epitaxial growth device, comprising an induction coil and a reaction body, wherein the induction coil is disposed along a circumferential direction of the reaction body, and the reaction body comprises a heating base and a plurality of trays,
wherein the heating base comprises a plurality of workspaces, the plurality of trays are disposed in the plurality of workspaces, respectively, and each of the plurality of trays is disposed in a corresponding workspace;
each of the plurality of trays is configured to support a substrate, and each of the plurality of trays is capable of independently rotating relative to the heating base;
the epitaxial growth device comprises a plurality of inlets and a plurality of outlets, each of the plurality of workspaces is provided with a corresponding inlet and a corresponding outlet opposite to each other, the plurality of inlets are configured to import a reaction medium into the plurality of workspaces, and the plurality of outlets are configured to discharge the reaction medium from the plurality of workspaces;
a direction along which the reaction medium flows from one of the plurality of inlets to one corresponding outlet opposite to the inlet is defined as a second direction, and adjacent two of the plurality of trays are staggered along the second direction; and
a center line along a direction perpendicular to an axis of the induction coil of one of the plurality of trays is defined as a first center line of one of the plurality of trays, and the second direction overlaps with the axis of the induction coil; a line parallel to the axis of the induction coil is defined as a path line, and the first center lines of the adjacent two of the plurality of trays intersect the path line.