US 12,327,709 B2
Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same
Dong-Hyub Lee, Seoul (KR); Dougyong Sung, Seoul (KR); Je-Hun Woo, Suwon-si (KR); Bongseong Kim, Yongin-si (KR); Juho Lee, Suwon-si (KR); Yun-Kwang Jeon, Seoul (KR); and Junghyun Cho, Suwon-si (KR)
Assigned to Samsung Electronics Co., Ltd., (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Feb. 26, 2021, as Appl. No. 17/186,965.
Application 17/186,965 is a continuation of application No. 15/723,837, filed on Oct. 3, 2017, granted, now 10,971,333.
Claims priority of application No. 10-2016-0138589 (KR), filed on Oct. 24, 2016; and application No. 10-2017-0098634 (KR), filed on Aug. 3, 2017.
Prior Publication US 2021/0183618 A1, Jun. 17, 2021
Int. Cl. H01L 21/3065 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01)
CPC H01J 37/3211 (2013.01) [H01J 37/321 (2013.01); H01J 37/32119 (2013.01); H01J 37/32174 (2013.01); H01J 37/32183 (2013.01); H01L 21/3065 (2013.01); H01J 2237/332 (2013.01); H01J 2237/334 (2013.01); H01L 21/67069 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for manufacturing a semiconductor device, the method comprising:
providing a substrate in a chamber; and
providing first and second radio-frequency powers into first and second antennas on the chamber to generate plasma on the substrate,
wherein each of the first and second antennas comprises:
an input electrode;
branch electrodes connected to the input electrode, wherein the branch electrodes are provided in plurality; and
coil electrodes connected to opposite ends of the branch electrodes, respectively, the coil electrodes extending and connecting the ends of the branch electrodes,
wherein a number of turns of the coil electrodes of the first antenna is equal to a number of turns of the coil electrodes of the second antenna,
wherein the coil electrodes are eccentric coil electrodes, configured such that a center of each of the eccentric coil electrodes is horizontally offset from a center on which the input electrode is disposed,
wherein the respective eccentric coil electrodes of the first and second antennas at least partially overlap one another in a vertical direction, and
wherein each of the eccentric coil electrodes comprises:
a top coil including a large-quarter top turn connected to the branch electrodes and a small-quarter top turn having a length shorter than that of the large-quarter top turn, the small-quarter top turn closer to the input electrode than the large-quarter top turn;
a connection electrode connected to the small-quarter top turn of the top coil; and
a bottom coil that is connected to the connection electrode and that is under the top coil, the bottom coil including a small-quarter bottom turn connected to the small-quarter top turn by the connection electrode and a large-quarter bottom turn having a length longer than that of the small-quarter bottom turn, the large-quarter bottom turn further from the input electrode than the small-quarter bottom turn,
wherein the large-quarter top turn, the small-quarter top turn, the connection electrode, the small-quarter bottom turn, and the large-quarter bottom turn are connected in series.