US 12,327,708 B2
Charged particle beam device and aberration correction method
Shingo Hayashi, Tokyo (JP); Hideto Dohi, Tokyo (JP); Zhaohui Cheng, Tokyo (JP); and Hideyuki Kazumi, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/778,526
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Nov. 21, 2019, PCT No. PCT/JP2019/045623
§ 371(c)(1), (2) Date May 20, 2022,
PCT Pub. No. WO2021/100172, PCT Pub. Date May 27, 2021.
Prior Publication US 2022/0415605 A1, Dec. 29, 2022
Int. Cl. H01J 37/153 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/153 (2013.01) [H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/1534 (2013.01); H01J 2237/24514 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A charged particle beam device, comprising:
a charged particle optical system which irradiates a sample with a charged particle beam from a charged particle source;
a detector which detects electrons emitted by an interaction between the charged particle beam and the sample; and
a controller,
wherein the charged particle optical system includes an aberration corrector which corrects aberration of the charged particle beam and the aberration corrector has multipoles of a plurality of stages,
wherein each of the multipoles includes a plurality of poles, and generates a predetermined multipole field by applying a predetermined correction voltage or correction current to the plurality of poles,
the aberration corrector is capable of generating a plurality of multipole fields in a superimposed manner in the multipoles of the plurality of stages in order to correct the aberration of the charged particle beam, and
the controller corrects, for any one first multipole field of the plurality of multipole fields to be generated in a multipole of any stage among the plurality of stages, a value of the predetermined correction voltage or correction current to be applied to the plurality of poles of the multipole for generating the first multipole field so as to eliminate a shift of an observation image obtained based on the electrons detected from the detector by irradiating the sample with the charged particle beam before and after the first multipole field is generated;
wherein when a diameter of a circle formed by connecting distal ends of the plurality of poles of the multipole is φ and a distance between the multipoles is d, a relationship of 5φ>d>0.50 is satisfied.