US 12,326,663 B2
Optical component
Valentin Jonatan Bolsinger, Aalen (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Mar. 21, 2023, as Appl. No. 18/187,295.
Application 18/187,295 is a continuation of application No. PCT/EP2021/076562, filed on Sep. 28, 2021.
Claims priority of application No. 102020212367.5 (DE), filed on Sep. 30, 2020.
Prior Publication US 2023/0221648 A1, Jul. 13, 2023
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70158 (2013.01) [G03F 7/70033 (2013.01); G03F 7/70191 (2013.01); G03F 7/70575 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An optical component, comprising:
a diffraction structure configured to diffractively influence a direction of emergence of light of at least one wavelength incident on the optical component,
wherein:
the diffraction structure comprises first and second diffraction substructures;
the first and second diffraction substructures are superimposed in at least one portion of the optical component;
the first diffraction substructure comprises first positive diffraction structures and first negative diffraction structures;
the first positive diffraction structures and the first negative diffraction structures follow a first symmetry condition;
the second diffraction substructure comprises second positive diffraction structures and second negative diffraction structures;
the second positive diffraction structures and the second negative diffraction structures follow a second symmetry condition; and
the second symmetry condition is different from the first symmetry condition.