US 12,326,519 B2
Responsivity enhanced photodetector with photon-trapping nanostructures
Bora Onat, Camarillo, CA (US); and M. Saif Islam, Davis, CA (US)
Assigned to Attollo Engineering, LLC, Camarillo, CA (US)
Filed by Attollo Engineering, LLC, Camarillo, CA (US)
Filed on Jul. 18, 2023, as Appl. No. 18/223,481.
Prior Publication US 2025/0028030 A1, Jan. 23, 2025
Int. Cl. G01S 7/481 (2006.01); G01S 17/89 (2020.01); H10F 39/00 (2025.01); H10F 39/12 (2025.01); H10F 39/18 (2025.01)
CPC G01S 7/4816 (2013.01) [H10F 39/184 (2025.01); H10F 39/199 (2025.01); H10F 39/806 (2025.01); H10F 39/8063 (2025.01); G01S 17/89 (2013.01)] 21 Claims
OG exemplary drawing
 
1. Photo Detector Array (PDA), comprising:
a back side that receives optical energy incident on the back side at an incident direction; and
a front side that includes a detection layer that absorbs the optical energy incident on the back side via a substrate, wherein the detection layer includes a plurality of detector structures and fill regions between adjacent detector structures, wherein the fill regions are filled with a dielectric material and include a plurality of nanostructures which cause optical energy incident on the fill regions to disperse perpendicularly to the incident direction to be absorbed by an absorber layer of the plurality of detector structures.