US 12,326,397 B2
In-situ apparatus for detecting abnormality in process tube
Yu-Jen Yang, Hsinchu (TW); Chung-Pin Chou, Hsinchu (TW); Kai-Lin Chuang, Hsinchu (TW); Yan-Cheng Chen, Hsinchu (TW); Sheng-Ching Kao, Hsinchu (TW); and Jun-Xiu Liu, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Aug. 30, 2021, as Appl. No. 17/461,715.
Prior Publication US 2023/0060183 A1, Mar. 2, 2023
Int. Cl. G01N 21/05 (2006.01); G01F 1/663 (2022.01); G01N 15/0205 (2024.01); G01N 15/14 (2024.01); G01N 21/95 (2006.01); G01N 15/10 (2006.01)
CPC G01N 21/05 (2013.01) [G01F 1/663 (2013.01); G01N 15/0211 (2013.01); G01N 21/9501 (2013.01); G01N 2015/1027 (2024.01); G01N 2021/054 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A process tube device, comprising:
a nozzle configured to receive fluid;
a main tube coupled to the nozzle, the main tube providing a channel for the fluid;
a first tube extending from the main tube, the first tube having a first side and a second side opposite of the first side;
a first sensor array containing a first sensor, a second sensor, and a third sensor positioned on and adjacent to the second side of the first tube, the first sensor further positioned between the second sensor and the third sensor;
a second sensor array containing a fourth sensor positioned on the first side of the first tube and adjacent to a light emitting source;
a third sensor array containing a fifth sensor positioned on the first side of the first tube and adjacent to the light emitting source;
wherein the light emitting source is positioned on the first side of the first tube between the second sensor array and the third sensor array and linearly opposite to the first sensor, the light emitting source configured to emit light to the channel along a first optical path, wherein the first optical path is linear between the light emitting source and the first sensor; and
a controller operatively coupled to the first, second, third, fourth, and fifth sensors and configured to receive data from the first, second, third, fourth, and fifth sensors, wherein the first, second, third, fourth, and fifth sensors receive signals based on the light from the light emitting source,
wherein the controller is further configured to:
determine at least one external material is present in fluid within the first tube in response to light emitted from the light emitting source being refracted from the at least one external material, propagated along a second optical path and received at the second sensor, the third sensor, or both the second and third sensors, wherein the second optical path is different from the first optical path; and
determine no external material is present in the fluid passing between the light emitting source and the first sensor in response to the first sensor receiving the light along the first optical path.