US 12,326,282 B2
Cooling flow in substrate processing according to predicted cooling parameters
Ala Moradian, San Jose, CA (US); Umesh Kelkar, Cupertino, CA (US); Orlando Trejo, Livermore, CA (US); Elizabeth Kathryn Neville, Redwood City, CA (US); and Karthik Ramanathan, Bangalore (IN)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Jan. 5, 2023, as Appl. No. 18/093,615.
Prior Publication US 2024/0230189 A1, Jul. 11, 2024
Int. Cl. F25B 49/00 (2006.01); F25B 41/40 (2021.01)
CPC F25B 49/00 (2013.01) [F25B 41/40 (2021.01); F25B 2500/19 (2013.01); F25B 2700/2105 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
receiving first data indicative of a process recipe for processing a substrate in a processing chamber of a substrate processing system;
inputting the first data into a model, wherein the model comprises a digital twin configured to represent thermal characteristics of the processing chamber;
receiving, via the model, a predicted value of a parameter associated with a flow of coolant through a cooling loop of the processing chamber; and
during execution of the process recipe in the processing chamber, causing coolant to flow through the cooling loop based on the predicted value of the parameter.
 
14. A system, comprising:
a processing chamber configured to process a substrate, the processing chamber comprising a cooling loop configured to flow coolant to cool at least a portion of the processing chamber;
a processing device configured to:
receive first data indicative of a process recipe for processing the substrate in the processing chamber;
input the first data into a model, wherein the model comprises a digital twin configured to represent thermal characteristics of the processing chamber;
receive, via the model, a predicted value of a parameter associated with a flow of coolant through the cooling loop of the processing chamber; and
during execution of the process recipe in the processing chamber, cause coolant to flow through the cooling loop based on the predicted value of the parameter.
 
18. A non-transitory machine-readable storage medium comprising instructions that, when executed by a processing device, cause the processing device to:
receive first data indicative of a process recipe for processing a substrate in a processing chamber of a substrate processing system;
input the first data into a trained machine learning model;
receive, via the trained machine learning model, a predicted value of a parameter associated with a flow of coolant through a cooling loop of the processing chamber; and
during execution of the process recipe in the processing chamber, cause coolant to flow through the cooling loop based on the predicted value of the parameter.