US 12,325,628 B2
Microelectromechanical device with out-of-plane stopper structure
Luca Guerinoni, Bergamo (IT); Patrick Fedeli, Senago (IT); and Luca Giuseppe Falorni, Limbiate (IT)
Assigned to STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed on May 13, 2022, as Appl. No. 17/744,310.
Claims priority of application No. 102021000013523 (IT), filed on May 25, 2021.
Prior Publication US 2022/0380202 A1, Dec. 1, 2022
Int. Cl. B81B 3/00 (2006.01); B81B 7/02 (2006.01)
CPC B81B 7/02 (2013.01) [B81B 3/0051 (2013.01); B81C 2203/0109 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A microelectromechanical device, comprising:
a substrate;
a first structural layer on the substrate;
a second structural layer on the first structural layer;
a sensing mass in the first structural layer;
a plurality of first elastic connections coupled to the sensing mass and to the substrate, the sensing mass having a maximum displacement distance in a sensing direction perpendicular to the substrate via the plurality of first elastic connections;
an anchor coupled to the substrate;
a limit plate in the second structural layer facing the sensing mass;
a gap between the sensing mass and the limit plate, the gap having a width less than the maximum displacement distance of the sensing mass; and
at least one second elastic connection coupled to the limit plate and to the anchor.