| CPC B81B 7/0074 (2013.01) [B81B 3/0021 (2013.01); H10N 30/85 (2023.02); H04W 4/029 (2018.02)] | 20 Claims |

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1. An electronic device comprising a microelectromechanical system (MEMS) device, the MEMS device including:
a board including:
a thin film piezoelectric layer;
an electrical contact; and
a ground plane;
wherein the board is configured to vibrate in response to a radiofrequency (RF) signal;
wherein the board is configured to generate energy for the electronic device due to the vibration and piezoelectric properties of the thin film piezoelectric layer; and
wherein the electrical contact is configured to allow for flow of electric charge of the generated energy to other one or more other portions of the electronic device.
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